The Scheme for setting up of Compound Semiconductors / Silicon Photonics / Sensors (including MEMS) Fabs / Discrete Semiconductors Fab and Semiconductor ATMP / OSAT facilities in India shall extend fiscal support of 50% of capital expenditure to Compound Semiconductors / Silicon Photonics / Sensors (including MEMS) Fabs and Semiconductor Packaging (ATMP / OSAT) units.
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Compound Semiconductor & ATMP
Procedure to Apply
Submission of relevant information to register with ISM and submit application
Detailed Project Report
Application fee as per Scheme and Guidelines.
*Fee shall be inclusive of GST however the transaction charges are to be borne by the Applicant independently
The tenure of the fiscal support shall be for a period of 5-6 years